| 摘要 |
PROBLEM TO BE SOLVED: To provide development processing equipment in which the capacity of a prescribed processing solvent in a processing solvent vessel can be increased more than ever before without making the entire equipment larger by effectively utilizing a dead space between the processing solvent vessel and a replenishment tank of the development processing equipment. SOLUTION: A plate-shaped subtank loadable in a gap between the processing solvent vessel and the replenishment tank mounted in a housing is formed, the subtank is provided in the gap, and also is communicated with the processing solvent vessel through a connecting pipe, and the connection pipe is provided with a circulation system for circulating a processing solvent between the subtank and the processing solvent vessel.
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