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发明名称
Chemical amplifying type positive resist composition
摘要
申请公布号
GB2373866(B)
申请公布日期
2003.03.26
申请号
GB20020007098
申请日期
2002.03.26
申请人
* SUMITOMO CHEMICAL COMPANY, LIMITED
发明人
YOSHIYUKI * TAKATA;HIROSHI * MORIUMA
分类号
G03F7/039;C08F20/28;G03F7/004;(IPC1-7):G03F7/039;H01L21/027
主分类号
G03F7/039
代理机构
代理人
主权项
地址
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