发明名称 APPARATUS FOR FIXING TIMING BELT OF EXPOSURE APPARATUS HAVING TENSION CONTROL MEMBER
摘要 PURPOSE: An apparatus for fixing a timing belt of an exposure apparatus having a tension control member is provided to control easily tension of a timing belt by using the tension control member. CONSTITUTION: The first block(110) is used for supporting the first end portion(150a) and the second end portion(150b) of a timing belt(150). The second block(120) is used for fixing the first end portion(150a) of the timing belt(150). The first fixing hole(142) is used for combining the first block(110) with the second block(120). The third block(130) is used for holding the second end portion(150b) of the timing belt(150). The second fixing hole(144) is used for combining the third block(130) with the first block(110). A tension control member(160) is extended from the second block(120) to the third block(130) in order to control tension of the timing belt(150).
申请公布号 KR20030024209(A) 申请公布日期 2003.03.26
申请号 KR20010057260 申请日期 2001.09.17
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 JUNG, U HYEON
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
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