| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a stamper for molding an optical disk which makes it possible to manufacture the optical disk substrate maintaining rectangularity at a low noise level. SOLUTION: This method of manufacturing the stamper for molding the optical disk substrate having a process step of applying a photoresist 2 across a primer layer on master disk glass 1, a process step of exposing parts thereto, a process step of fabricating a glass master by developing the patterns, a process step of forming a conductive film 6 on the surface of the glass master and a process step of plating metal onto the conductive surface 6, is characterized in that the primer layer is stripped by subjecting the surface of the glass master after development to an oxygen plasma ashing and is then baked.
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