INSTRUMENT AND JIG FOR MEASURING SUBSTRATE STORAGE CONTAINER

摘要

PROBLEM TO BE SOLVED: To provide high measurement accuracy and to simplify measuring work in a substrate storage container measuring instrument for measuring the outer dimension of an FOUP to be utilized for carrying a substrate. SOLUTION: A kinematic plate 10 equipped with a fixing pin 12 is provided at the position determined by the SEMI standard. An optical range finding sensor 14 is provided while fixing the relation of a positive position with the kinematic plate 10. On the kinematic plate 10, a jig 20 for measuring substrate storage container is located. The jig 20 for measuring substrate storage container is provided with a base plate 22 packaged on the kinematic plate 10 and a slide plate 24, which can slide relative to the base plate 22. The base plate 22 is provided with one group of grooves to be fitted with the fixing pin 12 for univocally determining the relative position on of the base plate 22 and the kinematic plate 10.