Pulse oscillating gas laser device e.g. excimer laser device has damping material inserted inside groove between raised portion of rib portion and high-voltage side of discharge electrode

摘要

The laser device has a rib portion (42) that is provided on a cathode base (36) and the high-voltage side of a discharge electrode (15) is fixed to the rib portion. A damping material (45) is inserted inside a groove (52) between a raised portion of the rib portion and the high-voltage side of the discharge electrode.