发明名称 Method of grinding semiconductor articles
摘要 Disclosed is a method of grinding semiconductor articles comprising the steps of: dicing a semiconductor wafer having bumps formed on one surface into individual chips or pellets; putting the pellets on a printed-wiring board with their flat, bump-less surfaces up; bonding the bumps of the pellets to the electrodes of the printed-wiring board; and grinding the flat, bump-less surfaces of the pellets simultaneously so that they may have a predetermined reduced thickness. The grinding post bonding has the advantageous effect of preventing pellets from being broken or fractured. <IMAGE>
申请公布号 EP0985494(A3) 申请公布日期 2003.01.22
申请号 EP19990116116 申请日期 1999.08.18
申请人 DISCO CORPORATION 发明人 KANEDA, YUKIHIRO;TAKIZAWA, SHUICHI
分类号 B24B7/22;H01L21/304;H01L21/78 主分类号 B24B7/22
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