| 摘要 |
PROBLEM TO BE SOLVED: To perform various treatment including a simple process without enlarging an occupied space. SOLUTION: The treating system is provided with a plurality of treating devices 32A-32F for performing prescribed treatment for an object to be treated, a common conveying chamber 34 connected commonly to the plurality of the treating devices, first and second conveying means 40, 42 for conveying the object to be treated between the treating devices provided in the common conveying chamber, buffer parts 50, 52 installed in a range in which the respective conveying ranges of the two conveying means are overlapped in the common conveying chamber and opened and closed by gate valves 58A, 58B on both the sides to be enclosed spaces, load lock chambers 36A, 36B capable of evacuating air by being connected to the common conveying chamber, an introduction side conveying chamber 38 connected to the load lock chamber, and an introduction side conveying means 124 for conveying the object to be treated between a cassette storing a plurality of the objects to be treated and the load lock chamber. |
