| 摘要 |
PURPOSE: Provided are glass plates with anti-fog and self-cleaning effects by coating the surface of glass with TiO2 through plasma processes. Accordingly, the glass plates are used for mirrors and glasses of cars, and construction interiors and exteriors. CONSTITUTION: The anti-fog glass plate is produced by forming a TiO2 film(1a) on the surface of a glass plate(1) through plasma processes such as plasma enhanced chemical vapor deposition(PECVD), inductively coupled plasma chemical vapor deposition(ICPCVD) using TiCl4 and O2 as sources, sputtering by using high purity titanium target and O2, and thermal deposition arising from evaporation of TiO2 powder. The TiO2 film adsorbs waterdrops(2) due to its hydrophilic property and forms water film, which results in anti-fog and anti-pollution effects, and clear sight in rainy days.
|
