Baffle for a capacitive pressure sensor

摘要

A baffle is positioned near a diaphragm of a capacitive pressure sensor to have a small volume therebetween. The baffle creates a high aspect ratio path to create molecular flow for molecules to travel before reaching the diaphragm. The path encourages contaminants to stick to the baffle or housing before reaching the diaphragm. The sensor further includes a particle trap between an inlet and the baffle.