发明名称 |
THIN FILM STRUCTURED SENSOR |
摘要 |
<p>The invention relates to a thin film structured sensor, having a dielectric carrier layer (21) on which a layer (23) containing platinum is arranged and at least a top layer (25) is arranged thereon. At least one surface of the layer (23) containing platinum is fitted with an additional adhesive layer (22) made of silicon, at least in certain areas.</p> |
申请公布号 |
EP1060365(B1) |
申请公布日期 |
2002.08.14 |
申请号 |
EP19990914410 |
申请日期 |
1999.02.11 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
TREUTLER, CHRISTOPH;MAREK, JIRI;KOBER, HANS-FRIEDEMANN;STEINER, WERNER |
分类号 |
G01F1/684;G01F1/692;G01K7/18;(IPC1-7):G01F1/692 |
主分类号 |
G01F1/684 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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