Integrated mask and method and apparatus for manufacturing organic el device using the same

摘要

An integrated mask (1) including a plurality of deposition masks (20), each deposition mask having an array of deposition apertures (32) formed in accordance with a deposition pattern; and a base plate (2) having a plurality of openings (10) on which the deposition masks are arranged is provided. The deposition masks are retained to the base plate by engaging units (40) in a disengageable manner, and alignment marks (6) used for positioning the deposition masks on the base plate are formed on the base plate. In addition, a method and apparatus for fabricating the integrated mask, a method and apparatus for manufacturing an organic EL device using the integrated mask, and an organic EL device are provided. <IMAGE>