发明名称 Solid state image detector and method for producing same
摘要 In a method for producing a solid state image detector, and a solid state image detector produced according to the method, a pixel matrix, made of a semiconductor material, particularly an amorphous silicon and a scintillator layer, for converting radiation incident on the scintillator layer so that it can be processed by the pixel matrix, is composed of a number of sub-detectors that are arranged side by side and that are referred to as panels, is coated with a passivation layer, and a layer that is transparent for the radiation emitted by the scintillator layer is deposited on the passivation layer, and the scintillator layer is vaporized on the layer thereafter.
申请公布号 US6429414(B1) 申请公布日期 2002.08.06
申请号 US20000538144 申请日期 2000.03.29
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 SPAHN MARTIN
分类号 G01T1/20;G01T1/202;G01T1/29;H01L27/00;H01L27/14;H01L27/148;H01L31/09;H04N5/32;(IPC1-7):H01L27/00 主分类号 G01T1/20
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