发明名称 Device for receiving an optical element made from crystalline calcium fluoride comprises an intermediate element arranged between a unit for holding the optical element and the optical element
摘要 Device for receiving an optical element made from crystalline calcium fluoride comprises an intermediate element (9) arranged between a unit (2) for holding the optical element and the optical element. The intermediate element has a lower heat absorption than the unit for holding the optical element. The optical element is coated with a functional layer in a vacuum deposition device. Preferred Features: The intermediate element is connected to the holding unit via supporting elements (10) made from poor heat conducting material. The intermediate element has a reflecting coating made from gold. The intermediate element is made from an aluminum alloy. The supporting elements are cylindrical, spherical or conical and are made from ruby or ceramic.
申请公布号 DE10100328(A1) 申请公布日期 2002.07.11
申请号 DE20011000328 申请日期 2001.01.05
申请人 CARL ZEISS 发明人 HARTMAIER, JUERGEN;KLAASEN, DIETRICH;BOEHM, THURE;WERGL, BERNHARD;GERHARD, MICHAEL;SPANUTH, JENS;KUSCHNEREIT, RALF;VOGT, PETER;BAUER, HARRY
分类号 C23C14/50;C23C16/46;(IPC1-7):C23C14/50 主分类号 C23C14/50
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