METHOD FOR PURIFYING SEMICONDUCTOR GASES

摘要

PURPOSE: An economical method for purifying semiconductor gases of low moisture level(less than about 200 ppb) is provided. CONSTITUTION: An impure liquefied gas is passed through a first absorption means to remove impurities from the liquid phase therein to produce a first purified fluid. The first purified fluid passed through an evaporation means to remove impurities therein to produce a second purified gas. The second purified gas passed through a second absorption means to remove impurities from the vapor phase therein to produce the ultra-high purity gas.