| 发明名称 |
SUPPORTING MEMBER |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a supporting member with a small coefficient of thermal expansion and excellent in heat resistance. SOLUTION: This supporting member of a ceramics member on which a wafer is to be placed is made up of a composite material of Si-SiC made up Si and SiC. |
| 申请公布号 |
JP2002167279(A) |
申请公布日期 |
2002.06.11 |
| 申请号 |
JP20000362947 |
申请日期 |
2000.11.29 |
| 申请人 |
TAIHEIYO CEMENT CORP |
发明人 |
AOKI ICHIRO;TSUTO HIROYUKI;TAKEI YOSHIBUMI;SHIOGAI TATSUYA |
| 分类号 |
C04B35/565;H01L21/68;H01L21/683 |
主分类号 |
C04B35/565 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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