DEVICE FOR MEASURING PRESSURE OF CLEARANCE TYPE CHARGED PARTICLE DETECTOR

摘要

PURPOSE: A device for measuring pressure of clearance type charged particle detector is provided to test air-tightness of the detector with a simple device. CONSTITUTION: A device comprises a clearance type charged particle detector(20); a compression and decompression device(30); and a pressure sensor(40). The clearance type charged particle detector has a gas inlet(27) on one side and a gas outlet(26) on the other side. The compression and decompression device is connected to the gas outlet to compress or decompress. The pressure sensor has one side connected to the gas inlet, the other side open and a middle section bent to be U-shaped to contain fluid(43) therein.