| 摘要 |
A thermal actuator for micro electro-mechanical devices, the actuator comprising a supporting substrate, an actuator actuation portion, a first arm attached at a first end thereof to the substrate and at a second end to the actuation portion, the first arm being arranged, in use, to be conductively heatable, a second arm attached at a first end to the supporting substrate and at a second end to the actuation portion, the second arm being spaced apart from the first arm, whereby the first and second arm define a gap between them; and wherein, in use, the first arm is arranged to undergo thermal expansion when conductively heated, thereby causing a force to be applied to the actuation portion.
|
