| 摘要 |
A MEM relay device includes a flexible multi-point contact system with a self-aligning structure. The inventive relay includes a first signal contact electrically connected to a first set of flexible electrically conductive signal teeth and a second signal contact electrically connected to a second set of flexible electrically conductive signal teeth. An actuator, selectively moves a shorting contact between an open and closed position. In the closed position, two sets of flexible electrically conductive shorting teeth mesh with a first set of flexible electrically conductive signal teeth and the second set of flexible electrically conductive signal teeth creating a conductive path between the two signal contacts. The contact structure facilitates fabrication using a deep reactive ion etch (DRIE) process and brings signal and actuator contacts to an edge of each die.
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