METHOD OF MANUFACTURE OF COLLOIDAL ROD PARTICLES AS NANOBARCODES

摘要

A method is disclosed for the manufacture of colloidal rod particles as nanobarcodes. Figure 3 shows an embodiment of the invention using a four-layer stack on a silicon wafer substrate (101). the substrate (101) is overlaid with conductive layer (102), polymeric layer (103), etch stop layer (104) and photoresist layer (105). Pores (106) are fomed following exposure and development of the photoresist and etching down to the etch stop layer. Pores (107) are fomred by a further etching down through polymer layer (103). Nanoparticles (108) are formed within pores (107) by electrochemical deposition using the conductive layer (102) as the plating electrode. The free-standing nanoparticles (109) are formed by subsequent dissolving of conductive layer (102) forming the nanobarcodes.