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发明名称
Method and apparatus for thickness measurement on transparent films
摘要
申请公布号
EP1098166(A3)
申请公布日期
2002.03.20
申请号
EP20000122582
申请日期
2000.10.17
申请人
LEICA MICROSYSTEMS WETZLAR GMBH
发明人
GANSER, MICHAEL;WEISS, ALBRECHT
分类号
G01B11/06;(IPC1-7):G01B11/06
主分类号
G01B11/06
代理机构
代理人
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地址
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