发明名称 POLYESTER FILM AS SUPPORT FOR DRY FILM RESIST
摘要 <p>A polyester film for a dry film resist, characterized in that it has a thickness of 10 mu m to 25 mu m and a haze value of 3 % or less and it contains a polycondensation metal catalyat residue in an amount less than 150 ppm and an antimony metal in the residue in an amount of 15 mmol % or less relative to 1 mole of all the acid components; and a laminated polyester film which comprises the above film and, formed on at least one surface thereof, a sliding layer. The polyester film for a dry film resist is satisfactory in transparency, particularly the transmittance of a light having a wave length near 365 nm, sliding property, winding characteristics, resolution and recyclability.</p>
申请公布号 WO0216466(A1) 申请公布日期 2002.02.28
申请号 WO2001JP07043 申请日期 2001.08.15
申请人 TEIJIN LIMITED;MIZUTANI, KEI;KUBO, KOJI 发明人 MIZUTANI, KEI;KUBO, KOJI
分类号 B32B27/36;C08J5/18;G03F7/09;(IPC1-7):C08G63/82;H05K3/06 主分类号 B32B27/36
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