摘要 |
<p>A polyester film for a dry film resist, characterized in that it has a thickness of 10 mu m to 25 mu m and a haze value of 3 % or less and it contains a polycondensation metal catalyat residue in an amount less than 150 ppm and an antimony metal in the residue in an amount of 15 mmol % or less relative to 1 mole of all the acid components; and a laminated polyester film which comprises the above film and, formed on at least one surface thereof, a sliding layer. The polyester film for a dry film resist is satisfactory in transparency, particularly the transmittance of a light having a wave length near 365 nm, sliding property, winding characteristics, resolution and recyclability.</p> |