发明名称 Method for fabricating semiconductor devices with dual gate oxides
摘要 A dual gate oxides' process for mixed-mode IC is provided. More particularly, the present invention relates to a dual gate oxides' process for mixed-mode IC, which protects and improves the dual gate oxides' quality.
申请公布号 US6346445(B1) 申请公布日期 2002.02.12
申请号 US20000715826 申请日期 2000.11.17
申请人 UNITED MICROELECTRONICS CORP. 发明人 HSU SHIH-YING
分类号 H01L21/762;H01L21/8234;(IPC1-7):H01L21/336 主分类号 H01L21/762
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