| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a sensor element, especially a biosensor element, for carrying effectively a functional layer on the surface of a solid on which a layer formed by including inorganic oxide material on the metal surface is formed, by executing silanization after giving a suitable pretreatment. SOLUTION: The surface of the solid on which the layer formed by including the inorganic oxide material on the metal surface is brought into contact with an acid solution having a concentration of 6N or below and treated, and then the functional layer is formed through silanization to thereby manufacture this sensor element. According to this manufacturing method, the acidity of the solid surface is improved by acid treatment to activate the surface, and thereby the subsequent silanization reaction is expected to be executed efficiently. Another effect of the acid treatment is a washing effect of the solid surface by the acid, and consequently undesirable pollution material for the silanization reaction stuck on the surface is removed, and thereby more uniform coupling of a silanization agent to the surface is expected. |
