| 发明名称 |
Micro positioning device with shared actuators |
| 摘要 |
A device for micro positioning of small objects using an actively generated friction force field. Positioning is achieved by sequentially holding the object by a gripper or holding means while moving the gripper on a manipulation surface by means of piezoelectric actuators.
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| 申请公布号 |
US2002004991(A1) |
申请公布日期 |
2002.01.17 |
| 申请号 |
US20010904755 |
申请日期 |
2001.07.13 |
| 申请人 |
SIN JEONGSIK |
发明人 |
SIN JEONGSIK |
| 分类号 |
B81C3/00;H01L21/68;H01L21/687;(IPC1-7):G01B5/00 |
主分类号 |
B81C3/00 |
| 代理机构 |
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