| 摘要 |
<p>A method and apparatus are disclosed for accurately and repeatably determining the thickness of a thin film (16) on a substrate (14), a rotating compensator (26) elliüpsometer is used which generates both 2w and 4w output signals. The 4w omega signal is used to provide an indication of the temperature of the sample. This information is used to correct the analysis of the film based on the 2w signal. These two different signals generated by a single device provide independent measurements of temperature and thickness and can be used to accurately analyse a sample whose temperature is unknown.</p> |
