发明名称 |
Fluoride crystalline optical lithography lens element blank |
摘要 |
<p>The invention provides a high quality identifiable fluoride crystalline optical microlithography lens element blank for formation into an lens element of a microlithography system. The highly qualified fluoride crystalline characteristics of the fluoride optical lithography lens blank ensure its beneficial performance in the demanding microlithography manufacturing regime which utilizes high energy short wavelength ultraviolet laser sources. The fluoride crystalline optical lithography lens element blanks are comprised of multiple adjoining abutting crystalline subgrains with low boundary angles.</p> |
申请公布号 |
EP1154046(A1) |
申请公布日期 |
2001.11.14 |
申请号 |
EP20000401271 |
申请日期 |
2000.05.09 |
申请人 |
CORNING INCORPORATED |
发明人 |
MAYOLET, ALEXANDRE MICHEL;PELL, MICHAEL ALAN |
分类号 |
C30B29/12;C30B11/00;G02B1/02;G03F7/20;(IPC1-7):C30B11/00 |
主分类号 |
C30B29/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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