发明名称 |
Three dimensional micromachined electromagnetic device and associated methods |
摘要 |
A micro-electromagnetic device having a three dimensional structure is formed using laser chemical vapor deposition on a conductive surface. Arrays of electromagnetic devices may be formed. Various techniques for facilitating deposition on the conductive surface may be used. A helical antenna for use in the THz region may be formed in accordance with the laser chemical vapor deposition. The antenna is preferably formed on a bolometer. |
申请公布号 |
US6271802(B1) |
申请公布日期 |
2001.08.07 |
申请号 |
US19980058843 |
申请日期 |
1998.04.13 |
申请人 |
MEMS OPTICAL, INC. |
发明人 |
CLARK RODNEY L.;DEAN, JR. ROBERT N. |
分类号 |
H01Q1/00;C23C16/46;G01J5/20;H01Q1/36;H01Q9/32;H01Q11/08;H01Q21/06;(IPC1-7):B05D3/02 |
主分类号 |
H01Q1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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