| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device capable of easily measuring the change in the state of a polishing face, properly determining the timing for dressing the polishing face and time for replacing the members constituting the polishing face and polishing the polishing face of a substrate in high quality. SOLUTION: In a polishing device provided with a top ring, a turn table 12 having a polishing face 12a and a dresser 11 regenerating the polishing face for polishing the polishing face with a workpiece to be polished intervening between the top ring and the polishing face 12a of the turn table 12 which are rotated independently of each other and capable of regenerating the polishing face 12a by means of a dresser 11 at specified timing, a nature measuring device provided with a sensor 13, etc., for observing the nature of the polishing face 12a of the turn table 12 is provided for regenerating the polishing face 12a by means of the dresser 11, an indicator 21 is provided for indicating the measuring result by observing the nature of the polishing face 12a by means of the nature measuring instrument in regenerating the polishing face 12a by means of the dresser 11. |
