发明名称 FILM FORMING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a film forming device that forms film of polymer organic electroluminescent material at a high throughput accurately without moving the correct position. SOLUTION: A pixel portion 111 is divided into a plurality of rows of pixels by a bank 121 and by moving a head part 106 of the film forming device along the rows of pixels, the coating liquid (R) 114a, coating liquid (G) 114b and coating liquid (B) 114c can be applied simultaneously in a stripe shape. By heating these coating liquid, an electroluminescent layers of red, green and blue colors can be formed.
申请公布号 JP2001185355(A) 申请公布日期 2001.07.06
申请号 JP20000311400 申请日期 2000.10.12
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;YAMAMOTO ICHIU;HIROKI MASAAKI;FUKUNAGA KENJI
分类号 H05B33/10;H01L27/32;H01L51/00;H01L51/30;H01L51/40;H01L51/50;H01L51/56;H05B33/12 主分类号 H05B33/10
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