| 摘要 |
<p>PURPOSE: To provide a wire bonder which is superior in silence and workability, having high degrees of freedom for the torch electrode in its movable range, enables high-speed operation and suppresses vibration of the torch electrode to a minimum. CONSTITUTION: This wire bonder is constituted, such that a torch electrode 4 is coupled directly with an output shaft 9a of a pulse motor 9, and a pulse motor 9 is driven by a high-resolution angle control circuit 16.</p> |
