ACCELERATION SENSOR AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a low-cost high-performance acceleration sensor by narrowing the variation breadth of its characteristics such as sensitivity, resonance frequency, etc., by a comparatively simple method. SOLUTION: After a piezoelectric element 1 formed into a disk shape is fixed to a vibrating board 3, an adhesive agent 11 is squeezed out onto the upper surface of the vibrating board 3 so as to extend in the whole circumferential direction more outside than the circumferential surface of the piezoelectric element 11, and fixing by adhesion is performed. Trimming adjustment for resonance frequency f0 and an output level is performed.