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发明名称
Einrichtung zur Bedampfung bandförmiger Substrate im Vakuum
摘要
申请公布号
DE4442733(C2)
申请公布日期
2001.04.26
申请号
DE19944442733
申请日期
1994.12.01
申请人
VON ARDENNE ANLAGENTECHNIK GMBH
发明人
ERBKAMM, WOLFGANG;JAESCH, GUENTER;NEUMANN, MATTHIAS
分类号
C23C14/56;(IPC1-7):C23C14/22
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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