Electrolytic ozone generating method, system and ozone water producing system

摘要

Service water is filtered (11) subjected to reverse osmosis (12) and processed by filtration (18) to remove substances that consume ozone. The thus purified water is deionized in an ion-exchanger (20) and the resulting ultrapure water in the range of 0.01 - 2.00 mu S/cm. The proper is supplied through a gas-liquid separating vessel (40) to an electrolysis cell (30). Ozone-containing gas produced on the anodic side of the cell (30) is separated from liquids in the vessel (40) and passed to a temperature-controlled mixing vessel (50) where it is mixed with purified water from filter unit (18). The resulting high concentration ozone water is supplied to a discharge device (26) which dilutes it with filtered service water to the desired concentration for use.