| 摘要 |
PROBLEM TO BE SOLVED: To provide abrasion resistance and durability by applying a specific diamond-like carbon film to a pattern portion's surface and a pattern forming surface of a shaft substrate and/or a sleeve substrate previously forming a pressure generating pattern. SOLUTION: This dynamic pressure fluid bearing 1 includes a shaft 11 and a sleeve 12 engaging with this. A diamond-like carbon film 11c is applied to a surface containing a thrust surface 111s of a collar portion 111 of a shaft 11 facing to the sleeve 12 and a contact surface with fluid such as oil or air of a shaft portion 112. In the diamond-like carbon film 11c, when a basic composition is represented by CHXSiYOZNVFW, X, Y, Z, V, W representing a mol ratio are preferably 0.05<=X<=0.7, 0<=Y<=3.0, 0<=Z<=1.0, 0<=V<=1.0, 0<=W<=0.2. The diamond-like carbon film 11c can be formed in a plasma CVD method, an ionization deposition method, and a spatter method. |
