SEMICONDUCTOR-FACTORY AUTOMATING EQUIPMENT, SYSTEM, AND METHOD FOR PROCESSING LOT OF SEMICONDUCTOR WAFER, AND RECORDING MEDIUM THEREOF

摘要

PROBLEM TO BE SOLVED: To effectively process the lot of a semiconductor wafer in a semiautomatic or completely automatic mode in accordance with a working file, by using a first or second semiconductor processing means operating respectively in a first or second operating mode. SOLUTION: A cell managing server(CMS) 206 judges whether process equipment(EQ) 204, i.e., overlaying equipment has the working file of a semiconductor process corresponding to the lot of a semiconductor wafer or not. When having the working file of the semiconductor process corresponding to the same, the CMS 206 assigns the semiconductor process to the EQ 204 operating in a completely automatic mode. When the overlaying equipment has no working file of the semiconductor process corresponding to the lot of the semiconductor wafer, the CMS 206 gives the working file to the EQ 204 operating in a semiautomatic mode. As a result, the lot of the semiconductor wafer can be processed effectively in the semiautomatic or completely automatic mode.