| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel electric current detection-type displacement sensor capable of detecting fine displacement. SOLUTION: Electrodes 5, 9 are mounted opposite to each other with a clearance. One of electrodes 5 is a silicon needle electrode, and consists of needle- shaped silicon cones having tapered points. The silicon needle-shaped cones having micromasks as vertexes, are formed by high selective ratio anisotropic etching of a silicon substrate or a silicon layer while using an impurity deposition area formed in the silicon substrate or the silicon layer as the micromasks. This sensor detects an electric current flowing between the electrodes when the voltage is applied to the electrodes, and the displacement is determined by utilizing the change of the current corresponding to a distance between the electrodes. When the vacuum is applied between the electrodes, a tunnel current flows, and when a gas is sealed between the electrodes, the discharging is produced.
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