| 摘要 |
PROBLEM TO BE SOLVED: To obtain an angular speed sensor in which an offset signal can be reduced while reducing the manufacturing cost. SOLUTION: The angular speed sensor comprises two first oscillators 1a, 1b juxtaposed in one direction while being supported to oscillate in the direction from a fixed part 4, an oscillatory spring 2 coupling the two first oscillators 1a, 1b while matching the extending/contracting direction with the first direction, a second oscillator 7 supported by the two first oscillators 1a, 1b to oscillate in a second direction orthogonal to a plane including the fixed part and the coupled first oscillators 1a, 1b, an oscillation generating means 9 for oscillating the second oscillator 7 and the two first oscillators 1a, 1b in the first direction to have a reverse phase, and means for detecting oscillation of the second oscillator 7 in the second direction. |
