DIAPHRAGM PRELOAD AIR BEARING,申请号EP20000905902-传众专利搜索

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发明名称	DIAPHRAGM PRELOAD AIR BEARING
摘要
申请公布号	EP1066475(A1)	申请公布日期	2001.01.10
申请号	EP20000905902	申请日期	2000.02.01
申请人	APPLIED MATERIALS, INC.	发明人	HIPOL, PHILIP, J.;HILL, DAVID, R.
分类号	B23Q1/26;B23Q1/01;B23Q1/38;B23Q1/58;F16C29/00;F16C29/02;F16C32/06;(IPC1-7):F16C32/06	主分类号	B23Q1/26
代理机构		代理人
主权项
地址

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