摘要 |
<p>PROBLEM TO BE SOLVED: To improve product yield by filling a gap having its dimension set via a ceramic coating formed, at least, on a surface of one electrode with electron emission materials. SOLUTION: An electrode 12 is arranged in parallel to an electrode 11 via a gap G. An electron emission material 14 is stuck and formed in a superimposed part of the electrodes 11, 12. The dimension of the gap G between a pair of electrodes 11, 12 is set via a ceramic coating 13 formed, at least, on a surface of one electrode 11. That is to say, the dimension of the gap G is extremely easily and accurately managed by controlling the thickness of the ceramic coating film 13. The gap G is filled with electron emission materials 14 so that the consumption of the electrodes 11, 12 can be prevented by setting electric resistance of the gap G under discharge to sufficiently small and the generated Joule's heat to small.</p> |