发明名称 Process for producing optical waveguide substrate
摘要 A process for producing an optical waveguide substrate including a ridge-shaped structural portion containing at least an optical waveguide, which process including the steps of forming an optical waveguide-forming layer on a substrate body to prepare a substrate workpiece, and forming said ridge-shaped structural portion at said substrate workpiece by grinding.
申请公布号 US6129864(A) 申请公布日期 2000.10.10
申请号 US19970882232 申请日期 1997.06.25
申请人 NGK INSULATORS, LTD. 发明人 IMAEDA, MINORU;KAWAGUCHI, TATSUO;INOUE, TAKAHIRO;YAMAUCHI, MASATOMO
分类号 G02B6/12;G02B6/13;G02B6/132;G02B6/136;G02F1/035;G02F1/37;(IPC1-7):B29O11/00 主分类号 G02B6/12
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