RETICLE AND ITS POSITIONING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a reticle which occupies less space and has reticle alignment marks having no possibility of being formed in wrong directions. SOLUTION: The reticle 31 consists of a flat planar transparent glass substrate and the center of its surface is a pattern forming region 32. Prescribed two points exclusive of the pattern forming region 32 are provided with the reticle alignment marks 33 and 33 for positioning of the reticle 31. The respective reticle alignment marks 33 are formed in a grid form by forming a plurality of light shieldable straight lines consisting of a prescribed width apart prescribed intervals in parallel to a transverse direction on the surface of the reticle 31 and forming a plurality of light shieldable straight lines consisting of the same width as the width of the straight lines described above apart the same intervals as the intervals of the straight lines in parallel in the longitudinal direction orthogonal with the respective straight lines. The entire part thereof consists of a square shape.