ELECTRON EMITTING SOURCE AND MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide an easy manufacturing method of an electron emitting source. SOLUTION: A negative electrode 102 is locally heated by carrying an arc electric current of DC 100 A and arc-discharging for a second in a chamber 101 of an He atmosphere under a pressure of 1 Pa. Negative electrode material for forming the negative electrode 102 is scattered and particles with a lot of carbon nanotubes formed on the surface are generated. The particles are collected and used as an emitter of the electron emitting source.