发明名称 INSULATED GATE FIELD-EFFECT TRANSISTOR AND SEMICONDUCTOR BODY, AND METHOD OF FORMING FIELD-EFFECT TRANSISTOR, AND METHOD OF FORMING SEMICONDUCTOR BODY
摘要 PROBLEM TO BE SOLVED: To form a buried layer self-aligned with a gate and a channel by solving the problem when introducing a buried layer, which is heavily-doped with impurities, having an opposite conductivity which is opposite to the conductivity of the source and the drain, along the width of a channel. SOLUTION: This transistor has a dielectric layer, a gate conductor, and a buried region, and the dielectric layer is arranged to be fit for use as the gate dielectric above the semiconductor body 10 between a first region and a second region, and the gate conductor is so arranged above the dielectric layer as to be used as the gate 18, and the buried region is of first conductivity and moreover has impurity concentration higher than the semiconductor body 10, and it is arranged basically apart from the surface of the semiconductor body 10, between the first region and the second region, and the buried region is aligned with the gate conductor.
申请公布号 JP2000196069(A) 申请公布日期 2000.07.14
申请号 JP19990368996 申请日期 1999.12.27
申请人 INFINEON TECHNOL NORTH AMERICA CORP;INTERNATL BUSINESS MACH CORP <IBM> 发明人 AKATSU HIROYUKI;YUUJUN RII;BEINTNER JOCHEN
分类号 H01L29/78;H01L21/336;H01L21/8234;H01L29/10;(IPC1-7):H01L29/78 主分类号 H01L29/78
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