| 摘要 |
<p>An electronic circuit for measuring the position of a spatially periodic intensity pattern of incident radiation includes an array of detectors (1); two or more correlator units (2, 3) each having arrays of capacitors (12, 13) connected to a buffer (14); and a phase angle computing unit (4). The pitch of the array of detectors (1) is smaller than the pitch of the incident intensity pattern so that the latter is oversampled, yielding high accuracy. The detector outputs (17) are weighted by respective fixed capacitance values (15, 16) which vary periodically along arrays of capacitors (12, 13), and a weighted sum of outputs for each correlator unit (2, 3) is output at its respective buffer (14). The capacitance values (15, 16) of respective correlator units (2, 3) are mutually offset by a predetermined phase shift. The analog computation using capacitor arrays (12, 13) is fast and energy efficient, and can be implemented as a VLSI circuit.</p> |
