VERTICAL CAVITY SURFACE EMITTING LASER

摘要

PROBLEM TO BE SOLVED: To stabilize a vertical cavity surface emitting laser by alternately laminating first and second semiconductor layers to form a first distributed Bragg reflection mirror, alternately laminating third and fourth semiconductor layers to form a second distributed Bragg reflection mirror, and forming such that the optical length of the semiconductor layers and protective layers is a specified wavelength of an oscillation light obtained from an active layer. SOLUTION: A first n-type distributed Bragg reflection mirror 103 is formed through an n-type GaAs buffer layer 102 on an n-type GaAs substrate 101, this mirror 103 is composed of alternately laminated n-type AlGaAs low- refractive index layers and n-type AlGaAs high-refractive index layers, and a second n-type distributed Bragg reflection mirror 107 is formed on the first mirror 103 through an active layer 105 sandwiched between upper and lower spacers 104, 106 with alternately laminated low-refractive index layers and high-refractive index layers such that the optical length of the refractive index layers and a protective layer 108 is quarter wavelength of the oscillation light of the active layer 105.