ACCEL TUBE RING OF ION IMPLANTER

摘要

PURPOSE: An accel tube ring of an ion implanter is provided which is easily dis assembled and assembled in preventive maintenance. CONSTITUTION: An accel tube ring of an ion implanter comprises: a first semicircular voltage supplier(100) having grooves for coupling on both ends; a second semicircular voltage supplier(104) having elastic members on both ends and a pair of fixed balls inserted into the grooves for coupling, a diameter of the second semicircular voltage supplier being smaller than that of the first semicircular voltage supplier.