| 摘要 |
PROBLEM TO BE SOLVED: To simplify a structure, to reduce costs, noises and the pressure shock of driven fluid and to improve pumping energy efficiency. SOLUTION: This pump is provided with an upper plate 4 having a first suction port 1, a second discharge port 2 and a driven fluid passage therebetween, a middle plate 7 having diaphragms 5a to 5e surface-exposed on a fluid channel 3 and distributed in a direction (y) and operation spaces 6a to 6e closed by the diaphragms, and a lower plate 11 having a third port 8, to which a driving fluid pressure is applied, separation spaces 9a to 9e continuous from the operation spaces 6a to 6e and driving fluid channels 10a to 10e for connecting these to the third port 8 in series or in parallel. Then, the surface of the middle plate 7 is joined to the backside of the upper plate 4, the surface of the lower plate 11 is joined to the backside of the middle plate 7, and the three plates 4, 7 and 11 are joined to be integral.
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