END POINT DETECTING APPARATUS AND METHOD FOR PRELIMINARY TREATMENT,申请号KR19950067694-传众专利搜索

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发明名称	END POINT DETECTING APPARATUS AND METHOD FOR PRELIMINARY TREATMENT
摘要
申请公布号	KR100242938(B1)	申请公布日期	2000.03.02
申请号	KR19950067694	申请日期	1995.12.29
申请人	ANELVA CORPORATION	发明人	TOI, SATOSI
分类号	H05H1/46;C23C16/44;C23C16/50;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/66	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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