发明名称 CARRIER FILM OF CONTINUOUS VACUUM TREATING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a carrier film of continuous vacuum treating device capable of improving the sealability and ensuring the quality of a material to be treated. SOLUTION: In the carrier film 1 with materials 5 to be treated lined up at regular intervals of P3 on the film base material 2, the material 5 are taped with mask tapes so that the regions 7 free of the material 5 are formed at regular intervals of P1. Consequently, the region 7 free of the material 5 is put between sealing materials and sealed to improve the sealability, and the quality of the material 5 is ensured since the material is out of contct with the sealing material.
申请公布号 JP2000054129(A) 申请公布日期 2000.02.22
申请号 JP19980223793 申请日期 1998.08.07
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NAMIKI SHIGERU;KOBAYASHI YASUHIRO
分类号 C23C14/56;H01L21/677;H01L21/68;(IPC1-7):C23C14/56 主分类号 C23C14/56
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