发明名称 |
CARRIER FILM OF CONTINUOUS VACUUM TREATING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a carrier film of continuous vacuum treating device capable of improving the sealability and ensuring the quality of a material to be treated. SOLUTION: In the carrier film 1 with materials 5 to be treated lined up at regular intervals of P3 on the film base material 2, the material 5 are taped with mask tapes so that the regions 7 free of the material 5 are formed at regular intervals of P1. Consequently, the region 7 free of the material 5 is put between sealing materials and sealed to improve the sealability, and the quality of the material 5 is ensured since the material is out of contct with the sealing material. |
申请公布号 |
JP2000054129(A) |
申请公布日期 |
2000.02.22 |
申请号 |
JP19980223793 |
申请日期 |
1998.08.07 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
NAMIKI SHIGERU;KOBAYASHI YASUHIRO |
分类号 |
C23C14/56;H01L21/677;H01L21/68;(IPC1-7):C23C14/56 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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